Mode transition of inductively coupled plasma in interlayer chamber
文献类型：期刊论文
| 作者 | Du Yin-Chang1; Cao Jin-Xiang1; Wang Jian1; Zheng Zhe1; Liu Yu1; Meng Guang2; Ren Ai-Min2; Zhang Sheng-Jun2 |
| 刊名 | ACTA PHYSICA SINICA
 |
| 出版日期 | 2012 |
| 卷号 | 61 |
| 关键词 | Icp Discharge E-h Mode Plasma Source Plasma Spectrum |
| ISSN号 | 1000-3290 |
| DOI | 10.7498/aps.61.195206 |
| 文献子类 | Article |
| 英文摘要 | We do some research on E-H mode transition of inductively coupled plasma (ICP) in the interlayer chamber, using the microwave phase and plasma spectrum diagnotic technique. The mode transition between E and H mode is a sudden changes phenomenon. The input power of the transition varies as the pressure changes in the chamber. The transition power from H to E is less than from E to H, so the hysteresis in power hence is established. The change of the relative spectral intensity is basically the same the variation of the electron density with input power. We obtain a stable plasma source, with an electron density ranging from 3.85 x 10(11) cm(-3) to 4.68 x 10(11) cm(-3), an outer surface area of 0.3 m(2), and a thickness of 2 cm. |
| WOS关键词 | OPTICAL-EMISSION SPECTROSCOPY ; H TRANSITION ; DISCHARGE ; HYSTERESIS ; DENSITY |
| 语种 | 英语 |
| WOS记录号 | WOS:000311841100048 |
| 出版者 | CHINESE PHYSICAL SOC |
| 源URL | [http://119.78.100.186/handle/113462/49123]  |
| 专题 | 中国科学院近代物理研究所 |
| 通讯作者 | Du Yin-Chang |
| 作者单位 | 1.Univ Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China 2.Test Phys & Numer Math Lab, Beijing 100076, Peoples R China |
| 推荐引用方式 GB/T 7714 | Du Yin-Chang,Cao Jin-Xiang,Wang Jian,et al. Mode transition of inductively coupled plasma in interlayer chamber[J]. ACTA PHYSICA SINICA,2012,61. |
| APA | Du Yin-Chang.,Cao Jin-Xiang.,Wang Jian.,Zheng Zhe.,Liu Yu.,...&Zhang Sheng-Jun.(2012).Mode transition of inductively coupled plasma in interlayer chamber.ACTA PHYSICA SINICA,61. |
| MLA | Du Yin-Chang,et al."Mode transition of inductively coupled plasma in interlayer chamber".ACTA PHYSICA SINICA 61(2012). |
入库方式： OAI收割
来源：近代物理研究所
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