中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Mode transition of inductively coupled plasma in interlayer chamber

文献类型:期刊论文

作者Du Yin-Chang1; Cao Jin-Xiang1; Wang Jian1; Zheng Zhe1; Liu Yu1; Meng Guang2; Ren Ai-Min2; Zhang Sheng-Jun2
刊名ACTA PHYSICA SINICA
出版日期2012
卷号61
关键词Icp Discharge E-h Mode Plasma Source Plasma Spectrum
ISSN号1000-3290
DOI10.7498/aps.61.195206
文献子类Article
英文摘要We do some research on E-H mode transition of inductively coupled plasma (ICP) in the interlayer chamber, using the microwave phase and plasma spectrum diagnotic technique. The mode transition between E and H mode is a sudden changes phenomenon. The input power of the transition varies as the pressure changes in the chamber. The transition power from H to E is less than from E to H, so the hysteresis in power hence is established. The change of the relative spectral intensity is basically the same the variation of the electron density with input power. We obtain a stable plasma source, with an electron density ranging from 3.85 x 10(11) cm(-3) to 4.68 x 10(11) cm(-3), an outer surface area of 0.3 m(2), and a thickness of 2 cm.
WOS关键词OPTICAL-EMISSION SPECTROSCOPY ; H TRANSITION ; DISCHARGE ; HYSTERESIS ; DENSITY
语种英语
WOS记录号WOS:000311841100048
出版者CHINESE PHYSICAL SOC
源URL[http://119.78.100.186/handle/113462/49123]  
专题中国科学院近代物理研究所
通讯作者Du Yin-Chang
作者单位1.Univ Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
2.Test Phys & Numer Math Lab, Beijing 100076, Peoples R China
推荐引用方式
GB/T 7714
Du Yin-Chang,Cao Jin-Xiang,Wang Jian,et al. Mode transition of inductively coupled plasma in interlayer chamber[J]. ACTA PHYSICA SINICA,2012,61.
APA Du Yin-Chang.,Cao Jin-Xiang.,Wang Jian.,Zheng Zhe.,Liu Yu.,...&Zhang Sheng-Jun.(2012).Mode transition of inductively coupled plasma in interlayer chamber.ACTA PHYSICA SINICA,61.
MLA Du Yin-Chang,et al."Mode transition of inductively coupled plasma in interlayer chamber".ACTA PHYSICA SINICA 61(2012).

入库方式: OAI收割

来源:近代物理研究所

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