Defect production in silicon carbide irradiated with Ne and Xe ions with energy of 2.3 MeV/amu
文献类型:会议论文
作者 | Zhang, C. H.; Sun, Y. M.; Song, Y.; Shibayama, T.; Jin, Y. F.; Zhou, L. H. |
出版日期 | 2007-03 |
关键词 | 4H-SiC Ne ions Xe ions irradiation TEM defects |
卷号 | 256 |
期号 | 1 |
DOI | 10.1016/j.nimb.2006.12.010 |
页码 | 243-247 |
英文摘要 | In the present work specimens of mono-crystalline silicon carbide (4H polytype) were irradiated to three successively increasing ion fluences ranging from 7.2 x 10(14) to 6.0 x 10(16) ions/cm(2) (corresponding to the peak displacement damage of 1, 4 and 13 dpa) with Ne and Xe ions respectively with the energy of 2.3 MeV/amu. The irradiated specimens were subsequently annealed at temperatures of 1173 and 1273 K. Defect structure was investigated with transmission electron microscopy (TEM) using a cross-sectional specimen preparation technique. |
会议录 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
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会议录出版者 | ELSEVIER SCIENCE BV |
会议录出版地 | PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS |
语种 | 英语 |
WOS研究方向 | Instruments & Instrumentation ; Nuclear Science & Technology ; Physics |
WOS记录号 | WOS:000245959300050 |
源URL | [http://119.78.100.186/handle/113462/57725] ![]() |
专题 | 中国科学院近代物理研究所 |
通讯作者 | Zhang, C. H. |
作者单位 | 1.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China 2.Hokkaido Univ, Ctr Adv Res Energy Convers Mat, Sapporo, Hokkaido, Japan |
推荐引用方式 GB/T 7714 | Zhang, C. H.,Sun, Y. M.,Song, Y.,et al. Defect production in silicon carbide irradiated with Ne and Xe ions with energy of 2.3 MeV/amu[C]. 见:. |
入库方式: OAI收割
来源:近代物理研究所
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