Research of TiZrV Pumping Coatings on the Inner Walls of Vacuum Chamber
文献类型：会议论文
| 作者 | Meng, J.; Yang, X. T.; Zhang, J. H.; Yang, W. S.; Guo, D. Z.; Hu, Z. J.; Zhao, Y. G.; Hou, S. J.; Luo, C.; Pan, F |
| 出版日期 | 2012 |
| 关键词 | TiZrV NEG coating vacuum Property pressure distrution ultimate pressure |
| 卷号 | 32 |
| DOI | 10.1016/j.phpro.2012.03.648 |
| 页码 | 865-868 |
| 英文摘要 | In order to coat TiZrV alloys on the inner-surface of slender vacuum pipe of accelerator, a set of DC (Direct-Current) diode magnetron sputtering system was set up through calculation. After sputtering deposition, it translates the vacuum pipe from gas source into a pump. The test results show that the ultimate pressure is lower and the problem of big pressure gradient distribution is solved after TiZrV NEG coating. (C) 2012 Published by Elsevier B. V. Selection and/or peer review under responsibility of Chinese Vacuum Society (CVS). |
| 会议录 | 18TH INTERNATIONAL VACUUM CONGRESS (IVC-18)
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| 会议录出版者 | ELSEVIER SCIENCE BV |
| 会议录出版地 | SARA BURGERHARTSTRAAT 25, PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS |
| 语种 | 英语 |
| WOS研究方向 | Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics |
| WOS记录号 | WOS:000310677500124 |
| 源URL | [http://119.78.100.186/handle/113462/58058]  |
| 专题 | 中国科学院近代物理研究所 |
| 通讯作者 | Meng, J. |
| 作者单位 | Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Meng, J.,Yang, X. T.,Zhang, J. H.,et al. Research of TiZrV Pumping Coatings on the Inner Walls of Vacuum Chamber[C]. 见:. |
入库方式： OAI收割
来源：近代物理研究所
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