Gettering of TiZrV coatings on pipe inner-walls of vacuum system
文献类型：期刊论文
| 作者 | Meng, Jun1,2 ; Yang, Xiaotian1; Zhang, Junhui1; Yang, Weishun1; He, Yuan1; Zhao, Yugang1; Hu, Zhenjun1; Guo, Dizhou1,2; Ma, Xiangli1; Hou, Shengjun1
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| 刊名 | Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
 |
| 出版日期 | 2009 |
| 卷号 | 29页码:678-681 |
| ISSN号 | 1672-7126 |
| DOI | 10.3969/j.issn.1672-7126.2009.06.17 |
| 英文摘要 | A novel technique was developed to turn the gas-load of the long, narrow stainless-steel pipes in vacuum system into non-evaporation getters (NEG). In the technique, the TiZrV films were grown by DC reactive magnetron sputtering on the inner walls of the pipes. The microstructures and compositions of the TiZrV coatings were characterized with scanning electron microscopy (SEM). The impacts of the activation conditions, including the activation temperature and time, on the gettering characteristics were studied. The results show that the TiZrV film, after activation at a lowest temperature of 180°C, is capable of gettering. The pressures at the remote end of the experimental setup and the pump inlet were found to be almost the same with a linear pressure distribution. |
| 出版者 | Science Press, 18,Shuangqing Street,Haidian, Beijing, 100085, China |
| 源URL | [http://119.78.100.186/handle/113462/64021]  |
| 专题 | 中国科学院近代物理研究所 |
| 作者单位 | 1.Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China 2.Graduate University of Chinese Academy of Sciences, Beijing 100049, China |
| 推荐引用方式 GB/T 7714 | Meng, Jun,Yang, Xiaotian,Zhang, Junhui,et al. Gettering of TiZrV coatings on pipe inner-walls of vacuum system[J]. Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,2009,29:678-681. |
| APA | Meng, Jun.,Yang, Xiaotian.,Zhang, Junhui.,Yang, Weishun.,He, Yuan.,...&Hou, Shengjun.(2009).Gettering of TiZrV coatings on pipe inner-walls of vacuum system.Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,29,678-681. |
| MLA | Meng, Jun,et al."Gettering of TiZrV coatings on pipe inner-walls of vacuum system".Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology 29(2009):678-681. |
入库方式： OAI收割
来源：近代物理研究所
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