The mechanism study of mixed Ar/O-2 plasma-cleaning treatment on niobium surface for work function improvement
文献类型：期刊论文
| 作者 | Zhang, Zhiyan1; Ye, Zongbiao2; Wang, Zhijun3; Gou, Fujun2; Shen, Bizhou4; Wu, Andong5; He, Yuan5 ; He, Pingni2; Wang, Hongbin2; Chen, Bo2
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| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2019-05-01 |
| 卷号 | 475页码:143-150 |
| 关键词 | Niobium Hydrocarbon Surface cleaning Work function Plasma Oxide layer |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2018.12.156 |
| 英文摘要 | In-situ plasma processing and characterization approach were developed to remove the hydrocarbon on the niobium and monitor the real-time performance of Nb samples. The inherent synergistic mechanism of Ar and O-2 as active plasma detergents to remove hydrocarbon and improve work function was studied. The change of specific chemical speciation and oxide layer caused by plasma processing were investigated through XPS, XRD and RBS. The results showed that the initial cleaning rate of Nb samples improved with the increase of O atoms. And the presence of O+ species could further facilitate the transform from intermediate oxidation state of Nb to its highest oxidation state (Nb2O5, 5.2 eV). Moreover, the role of oxygen could also enhance the thickness of oxide layer from original 7 nm to 23 nm. This study provided a comprehensive understanding of plasma as an effective cleaning technique for niobium cavities. |
| WOS关键词 | FIELD-EMISSION ; XPS ; CAVITIES |
| 资助项目 | National Natural Science Foundation of China[11275135] ; National Natural Science Foundation of China[11475122] ; Major Research Plan of National Natural Science Foundation of China[91426303] ; Fundamental Research Funds for the central Universities |
| WOS研究方向 | Chemistry ; Materials Science ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000458482100017 |
| 出版者 | ELSEVIER SCIENCE BV |
| 资助机构 | National Natural Science Foundation of China ; Major Research Plan of National Natural Science Foundation of China ; Fundamental Research Funds for the central Universities |
| 源URL | [http://119.78.100.186/handle/113462/65029]  |
| 专题 | 中国科学院近代物理研究所 |
| 作者单位 | 1.Sichuan Univ, Inst Atom & Mol Phys, Chengdu 610064, Sichuan, Peoples R China 2.Sichuan Univ, Inst Nucl Sci & Technol, Chengdu 610064, Sichuan, Peoples R China 3.Chengdu Univ, Inst Adv Study, Chengdu 610106, Sichuan, Peoples R China 4.Dipont Educ Management Grp, ENREACH Educ Chengdu, Chengdu 617000, Sichuan, Peoples R China 5.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Gansu, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Zhiyan,Ye, Zongbiao,Wang, Zhijun,et al. The mechanism study of mixed Ar/O-2 plasma-cleaning treatment on niobium surface for work function improvement[J]. APPLIED SURFACE SCIENCE,2019,475:143-150. |
| APA | Zhang, Zhiyan.,Ye, Zongbiao.,Wang, Zhijun.,Gou, Fujun.,Shen, Bizhou.,...&Wei, Jianjun.(2019).The mechanism study of mixed Ar/O-2 plasma-cleaning treatment on niobium surface for work function improvement.APPLIED SURFACE SCIENCE,475,143-150. |
| MLA | Zhang, Zhiyan,et al."The mechanism study of mixed Ar/O-2 plasma-cleaning treatment on niobium surface for work function improvement".APPLIED SURFACE SCIENCE 475(2019):143-150. |
入库方式： OAI收割
来源：近代物理研究所
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