Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications
文献类型：期刊论文
| 作者 | Zhang Y(张吟)
|
| 刊名 | Journal of Micromechanics and Microengineering
 |
| 出版日期 | 2007 |
| 卷号 | 17期号:4页码:753-762 |
| 通讯作者邮箱 | zhangyin@lnm.imech.ac.cn |
| 关键词 | Thin-Films Micromachined Beams Residual-Stress Cantilever Beam Stoney Formula Surface Stress Strain Bilayer Systems Model |
| ISSN号 | 0960-1317 |
| 通讯作者 | Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China. |
| 中文摘要 | The close form solutions of deflections and curvatures for a film-substrate composite structure with the presence of gradient stress are derived. With the definition of more precise kinematic assumption, the effect of axial loading due to residual gradient stress is incorporated in the governing equation. The curvature of film-substrate with the presence of gradient stress is shown to be nonuniform when the axial loading is nonzero. When the axial loading is zero, the curvature expressions of some structures derived in this paper recover the previous ones which assume the uniform curvature. Because residual gradient stress results in both moment and axial loading inside the film-substrate composite structure, measuring both the deflection and curvature is proposed as a safe way to uniquely determine the residual stress state inside a film-substrate composite structure with the presence of gradient stress. |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics |
| 关键词[WOS] | THIN-FILMS ; MICROMACHINED BEAMS ; RESIDUAL-STRESS ; CANTILEVER BEAM ; STONEY FORMULA ; SURFACE STRESS ; STRAIN ; BILAYER ; SYSTEMS ; MODEL |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000245434200018 |
| 公开日期 | 2009-08-03 ; 2010-06-13 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/34009]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Zhang Y. Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications[J]. Journal of Micromechanics and Microengineering,2007,17(4):753-762. |
| APA | 张吟.(2007).Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications.Journal of Micromechanics and Microengineering,17(4),753-762. |
| MLA | 张吟."Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications".Journal of Micromechanics and Microengineering 17.4(2007):753-762. |
入库方式： OAI收割
来源：力学研究所
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