中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications

文献类型:期刊论文

作者Zhang Y(张吟)
刊名Journal of Micromechanics and Microengineering
出版日期2007
卷号17期号:4页码:753-762
通讯作者邮箱zhangyin@lnm.imech.ac.cn
关键词Thin-Films Micromachined Beams Residual-Stress Cantilever Beam Stoney Formula Surface Stress Strain Bilayer Systems Model
ISSN号0960-1317
通讯作者Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
中文摘要The close form solutions of deflections and curvatures for a film-substrate composite structure with the presence of gradient stress are derived. With the definition of more precise kinematic assumption, the effect of axial loading due to residual gradient stress is incorporated in the governing equation. The curvature of film-substrate with the presence of gradient stress is shown to be nonuniform when the axial loading is nonzero. When the axial loading is zero, the curvature expressions of some structures derived in this paper recover the previous ones which assume the uniform curvature. Because residual gradient stress results in both moment and axial loading inside the film-substrate composite structure, measuring both the deflection and curvature is proposed as a safe way to uniquely determine the residual stress state inside a film-substrate composite structure with the presence of gradient stress.
类目[WOS]Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics
研究领域[WOS]Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics
关键词[WOS]THIN-FILMS ; MICROMACHINED BEAMS ; RESIDUAL-STRESS ; CANTILEVER BEAM ; STONEY FORMULA ; SURFACE STRESS ; STRAIN ; BILAYER ; SYSTEMS ; MODEL
收录类别SCI
语种英语
WOS记录号WOS:000245434200018
公开日期2009-08-03 ; 2010-06-13
源URL[http://dspace.imech.ac.cn/handle/311007/34009]  
专题力学研究所_力学所知识产出(1956-2008)
推荐引用方式
GB/T 7714
Zhang Y. Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications[J]. Journal of Micromechanics and Microengineering,2007,17(4):753-762.
APA 张吟.(2007).Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications.Journal of Micromechanics and Microengineering,17(4),753-762.
MLA 张吟."Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications".Journal of Micromechanics and Microengineering 17.4(2007):753-762.

入库方式: OAI收割

来源:力学研究所

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