Surface Disorder of GaN Irradiated by Highly Charged Arq+-Ions
文献类型：期刊论文
| 作者 | Song Shu-Jian; Zhang Li-Qing ; Zhang Chong-Hong; Yang Yi-Tao; Yao Cun-Feng; Li Bing-Sheng; Sun You-Mei
|
| 刊名 | CHINESE PHYSICS LETTERS
 |
| 出版日期 | 2009-03-01 |
| 卷号 | 26期号:3页码:4 |
| ISSN号 | 0256-307X |
| 英文摘要 | The surface damage to gallium nitride films irradiated by Arq+ (6 <= q <= 16) ions at room temperature is studied by the atomic force microscopy. It is found that when charge state exceeds a threshold value, significant swelling was turned into obvious erosion in the irradiated region. The surface change of the irradiated region strongly depends on the charge state and ion fluence. On the other hand, surface change is less dependent on the kinetic energy nearly in the present experimental range (120 keV <= E-k <= 220 keV). For q <= 14, surface of the irradiated region is covered with an amorphous layer, rough and bulgy. A step-up appears between the irradiated and un-irradiated region. Moreover, the step height and the surface roughness are functions of the ion dose and charge state, and increase with the increase of dose and charge state. Especially at and near boundary, a sharp bump like ridges in irradiated areas is observed, and there appear characteristic grooves in un-irradiated areas. For q = 16, surface of the irradiated region was etched and erased. |
| WOS关键词 | GALLIUM NITRIDE ; IMPLANTED GAN ; BOMBARDMENT |
| 资助项目 | National Natural Science Foundation of China[GJ10575124] ; Xi-Bu-Zhi-Guang Project of Chinese Academy of Sciences |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000263601300048 |
| 出版者 | IOP PUBLISHING LTD |
| 资助机构 | National Natural Science Foundation of China ; Xi-Bu-Zhi-Guang Project of Chinese Academy of Sciences |
| 公开日期 | 2009-11-20 |
| 源URL | [http://ir.imp.cas.cn/handle/113462/128]  |
| 专题 | 近代物理研究所_近代物理研究所知识存储（2010之前） 近代物理研究所_材料研究中心 近代物理研究所_先进核能材料研究室（ADS） |
| 通讯作者 | Zhang Li-Qing |
| 作者单位 | Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Song Shu-Jian,Zhang Li-Qing,Zhang Chong-Hong,et al. Surface Disorder of GaN Irradiated by Highly Charged Arq+-Ions[J]. CHINESE PHYSICS LETTERS,2009,26(3):4. |
| APA | Song Shu-Jian.,Zhang Li-Qing.,Zhang Chong-Hong.,Yang Yi-Tao.,Yao Cun-Feng.,...&Sun You-Mei.(2009).Surface Disorder of GaN Irradiated by Highly Charged Arq+-Ions.CHINESE PHYSICS LETTERS,26(3),4. |
| MLA | Song Shu-Jian,et al."Surface Disorder of GaN Irradiated by Highly Charged Arq+-Ions".CHINESE PHYSICS LETTERS 26.3(2009):4. |
入库方式： OAI收割
来源：近代物理研究所
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