Research for a clean and large throughput differential pumping system
文献类型：期刊论文
| 作者 | Meng Jun2,3 ; Yang Xiao-Tian2; Zhang Su-Ping3; Chu Ji-Guo1
|
| 刊名 | CHINESE PHYSICS C
 |
| 出版日期 | 2008-03-01 |
| 卷号 | 32期号:Suppl. 1页码:59-61 |
| 关键词 | clean and large throughput differential pumping system new kind of Molecular/Booster Pump back-oil residual gas analysis |
| ISSN号 | 1674-1137 |
| 英文摘要 | The research is to design a differential pumping system not only to achieve the pressure transition with a large throughput, but also to achieve a clean system without back-oil. In the paper, the pressure in differential stages is calculated; the differential pumping system design and equipment choice are introduced; the tests of Molecular/Booster Pump (MBP), a new kind of molecular-drag pump with large throughout and clean vacuum are described and the system experimental result and analysis are presented. |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000255855900019 |
| 出版者 | SCIENCE CHINA PRESS |
| 公开日期 | 2010-10-29 |
| 源URL | [http://ir.imp.cas.cn/handle/113462/5755]  |
| 专题 | 近代物理研究所_近代物理研究所知识存储（2010之前） |
| 通讯作者 | Meng Jun |
| 作者单位 | 1.Shenzhen Univ, Shenzhen 518060, Peoples R China 2.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China 3.Grad Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Meng Jun,Yang Xiao-Tian,Zhang Su-Ping,et al. Research for a clean and large throughput differential pumping system[J]. CHINESE PHYSICS C,2008,32(Suppl. 1):59-61. |
| APA | Meng Jun,Yang Xiao-Tian,Zhang Su-Ping,&Chu Ji-Guo.(2008).Research for a clean and large throughput differential pumping system.CHINESE PHYSICS C,32(Suppl. 1),59-61. |
| MLA | Meng Jun,et al."Research for a clean and large throughput differential pumping system".CHINESE PHYSICS C 32.Suppl. 1(2008):59-61. |
入库方式： OAI收割
来源：近代物理研究所
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