Structural and photoluminescent properties of ZnO films deposited by radio frequency reactive sputtering
文献类型：期刊论文
| 作者 | Peng, XingPing; Wang, ZhiGuang; Song, Yin; Ji, Ta; Zang, Hang; Yang, YingHu; Jin, YunFan |
| 刊名 | SCIENCE IN CHINA SERIES G-PHYSICS MECHANICS & ASTRONOMY
 |
| 出版日期 | 2007-06-01 |
| 卷号 | 50期号:3页码:281-286 |
| 关键词 | ZnO films XRD spectra PL spectra substrate temperature RF reactive sputtering |
| ISSN号 | 1672-1799 |
| DOI | 10.1007/s11433-007-0007-0 |
| 英文摘要 | Zinc oxide films with c-axis preferred orientation were deposited on silicon (100) substrates by radio frequency (RF) reactive sputtering. The properties of the samples were characterized by X-ray diffractometer, X-ray photoelectron spectroscopy and fluorescent-spectrophotometer. The effect of sputtering power and substrate temperature on the structural and photoluminescent (PL) properties of the ZnO films was investigated. The results indicated that when the sputtering power is 100 W and the substrate temperature is 300-400 degrees C, it is suitable for the growth of high c-axis orientation and small strain ZnO films. A violet peak at about 380 nm and a blue band at about 430 nm were observed in the room temperature photoluminescence spectra, and the origin of blue emission was investigated. |
| WOS关键词 | THIN-FILMS ; OPTICAL-PROPERTIES ; TEMPERATURE ; SAPPHIRE ; GROWTH |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000247837600003 |
| 出版者 | SCIENCE CHINA PRESS |
| 公开日期 | 2010-10-29 |
| 源URL | [http://ir.imp.cas.cn/handle/113462/5919]  |
| 专题 | 近代物理研究所_近代物理研究所知识存储（2010之前） |
| 通讯作者 | Peng, XingPing |
| 作者单位 | 1.Lanzhou Univ, Sch Phys Sci & Technol, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Peng, XingPing,Wang, ZhiGuang,Song, Yin,et al. Structural and photoluminescent properties of ZnO films deposited by radio frequency reactive sputtering[J]. SCIENCE IN CHINA SERIES G-PHYSICS MECHANICS & ASTRONOMY,2007,50(3):281-286. |
| APA | Peng, XingPing.,Wang, ZhiGuang.,Song, Yin.,Ji, Ta.,Zang, Hang.,...&Jin, YunFan.(2007).Structural and photoluminescent properties of ZnO films deposited by radio frequency reactive sputtering.SCIENCE IN CHINA SERIES G-PHYSICS MECHANICS & ASTRONOMY,50(3),281-286. |
| MLA | Peng, XingPing,et al."Structural and photoluminescent properties of ZnO films deposited by radio frequency reactive sputtering".SCIENCE IN CHINA SERIES G-PHYSICS MECHANICS & ASTRONOMY 50.3(2007):281-286. |
入库方式： OAI收割
来源：近代物理研究所
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