Effect of substrate and annealing on the structural and optical properties of ZnO:Al films
文献类型：期刊论文
| 作者 | Zhao, Xinggang4; Ding, Jijun2; Chen, Haixia2; Ma, Shuyi1,2,3 |
| 刊名 | JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
 |
| 出版日期 | 2010 |
| 卷号 | 71期号:3页码:346-350 |
| 关键词 | Zinc-oxide Films Chemical-vapor-deposition Thin-films Rf Dependence Devices Growth Pld |
| ISSN号 | 0022-3697 |
| DOI | 10.1016/j.jpcs.2009.12.088 |
| 英文摘要 | ZnO:Al thin films with c-axis preferred orientation were deposited on glass and Si substrates using RF magnetron sputtering technique. The effect of substrate on the structural and optical properties of ZnO:Al films were investigated. The results showed a strong blue peak from glass-substrate ZnO:Al film whose intensity became weak when deposited on Si substrate. However, the full width at half maxima (FWHM) of the Si-substrate ZnO:Al (0 0 2) peaks decreased evidently and the grain size increased. Finally, we discussed the influence of annealing temperature on the structural and optical properties of Si-substrate ZnO:Al films. After annealing, the crystal quality of Si-substrate ZnO:Al thin films was markedly improved and the intensity of blue peak (similar to 445 nm) increased noticeably. This observation may indicate that the visible emission properties of the ZnO:Al films are dependent more on the film crystallinity than on the film stoichiometry. Crown Copyright (C) 2009 Published by Elsevier Ltd. All rights reserved. |
| WOS关键词 | ZINC-OXIDE FILMS ; CHEMICAL-VAPOR-DEPOSITION ; THIN-FILMS ; RF ; DEPENDENCE ; DEVICES ; GROWTH ; PLD |
| 资助项目 | Natural Science Foundation of Gansu Province[0710RJZA105] |
| WOS研究方向 | Chemistry ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000276011400034 |
| 出版者 | PERGAMON-ELSEVIER SCIENCE LTD |
| 公开日期 | 2011-04-20 |
| 源URL | [http://ir.imp.cas.cn/handle/113462/7997]  |
| 专题 | 近代物理研究所_近代物理研究所知识存储（2010之前） |
| 通讯作者 | Ma, Shuyi |
| 作者单位 | 1.IMP CAS, Lanzhou 730070, Peoples R China 2.NW Normal Univ, Coll Phys & Elect Engn, Lanzhou 730070, Peoples R China 3.NWNU, Joint Lab Atom & Mol Phys, Lanzhou 730070, Peoples R China 4.Dingxi Normal Coll, Dept Phys, Dingxi 743000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhao, Xinggang,Ding, Jijun,Chen, Haixia,et al. Effect of substrate and annealing on the structural and optical properties of ZnO:Al films[J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS,2010,71(3):346-350. |
| APA | Zhao, Xinggang,Ding, Jijun,Chen, Haixia,&Ma, Shuyi.(2010).Effect of substrate and annealing on the structural and optical properties of ZnO:Al films.JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS,71(3),346-350. |
| MLA | Zhao, Xinggang,et al."Effect of substrate and annealing on the structural and optical properties of ZnO:Al films".JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS 71.3(2010):346-350. |
入库方式： OAI收割
来源：近代物理研究所
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