Spectra study of He-irradiation induced defects in 6H-SiC
文献类型：期刊论文
| 作者 | Pang Li-Long2; Cui Ming-Huan1,2; Zhang Hong-Peng2 ; Li Yuan-Fei2; Wang Ji1,2; Zhu Hui-Ping1,2; Du Yang-Yang1,2; Li Bing-Sheng2; Wang Dong1,2; Song Peng1,2
|
| 刊名 | ACTA PHYSICA SINICA
 |
| 出版日期 | 2014-11-05 |
| 卷号 | 63 |
| 关键词 | 6h-sic Helium Bubbles Raman Scattering Spectra Uv-visible Transmittance Spectra |
| ISSN号 | 1000-3290 |
| DOI | 10.7498/aps.63.216101 |
| 文献子类 | Article |
| 英文摘要 | Specimens of 6H-SiC were irradiated by 300keV He ions at temperatures of RT, 450, 600 and 750 degrees C with fluences ranging from 1 x 10(15) to 1 x 10(17) cm(-2). Post-irradiation, virgin and irradiated 6H-SiC specimens are measured and studied by microscopic laser confocal Raman spectrometer and UV-visible transmission apparatus. Analyses of both experimental results shown that production and recovery of defects caused by irradiation are directly related to the fluences and temperatures. Amorphization of 6H-SiC irradiated at RT occurrs, which is reflected by the disappearance of the Raman peaks and the saturation of the relative Raman intensity(simultaneously a strong Si-Si peak appears). Recovery of defects may exist in high-temperature irradiation, when helium bubbles do not exist, so that irradiation-induced defects can be easily recovered during irradiation process at elevated temperatures; but when helium bubbles are present, they can inhibit defects to recover, as shown in the trend of slopes of curves representing the relative Raman intensity and the relative absorption coefficients. This paper mainly focuses on the effects of helium bubbles on defect accumulation and recovery under the condition of high temperature irradiation, and then the comparison with the results of 6H-SiC irradiated by Si ions at elevated temperatures. |
| WOS关键词 | SILICON-CARBIDE ; ANNEALING BEHAVIOR ; OPTICAL-PROPERTIES ; ION-IMPLANTATION ; RAMAN-SPECTROSCOPY ; DAMAGE ; RECRYSTALLIZATION ; AMORPHIZATION ; ENERGY ; TEMPERATURE |
| 资助项目 | National Natural Science Foundation of China[11005130] ; National Natural Science Foundation of China[11105190] ; National Natural Science Foundation of China[11475229] ; National Natural Science Foundation of China[91126011] |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000344616700038 |
| 出版者 | CHINESE PHYSICAL SOC |
| 源URL | [http://119.78.100.186/handle/113462/49393]  |
| 专题 | 近代物理研究所_先进核能材料研究室（ADS） |
| 通讯作者 | Wang Zhi-Guang |
| 作者单位 | 1.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 2.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Pang Li-Long,Cui Ming-Huan,Zhang Hong-Peng,et al. Spectra study of He-irradiation induced defects in 6H-SiC[J]. ACTA PHYSICA SINICA,2014,63. |
| APA | Pang Li-Long.,Cui Ming-Huan.,Zhang Hong-Peng.,Li Yuan-Fei.,Wang Ji.,...&Zhu Ya-Bin.(2014).Spectra study of He-irradiation induced defects in 6H-SiC.ACTA PHYSICA SINICA,63. |
| MLA | Pang Li-Long,et al."Spectra study of He-irradiation induced defects in 6H-SiC".ACTA PHYSICA SINICA 63(2014). |
入库方式： OAI收割
来源：近代物理研究所
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