The study of helicon plasma source
文献类型：会议论文
| 作者 | Sun, Liang-Ting1 ; Miao, Ting-Ting1,2; Zhao, Hong-Wei1; Liu, Zhan-Wen1; Shang, Yong1,2; Zhao, Huan-Yu1; Zhang, Xue-Zhen1
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| 出版日期 | 2010-02 |
| 关键词 | antennas in plasma helicons Langmuir probes plasma density plasma sources |
| 卷号 | 81 |
| 期号 | 2 |
| DOI | 10.1063/1.3271172 |
| 英文摘要 | Helicon plasma source is known as efficient generator of uniform and high density plasma. A helicon plasma source was developed for investigation of plasma neutralization and plasma lens in the Institute of Modern Physics in China. In this paper, the characteristics of helicon plasma have been studied by using Langmuir four-probe and a high argon plasma density up to 3.9x10(13) cm(-3) have been achieved with the Nagoya type III antenna at the conditions of the magnetic intensity of 200 G, working gas pressure of 2.8x10(-3) Pa, and rf power of 1200 W with a frequency of 27.12 MHz. In the experiment, the important phenomena have been found: for a given magnetic induction intensity, the plasma density became greater with the increase in rf power and tended to saturation, and the helicon mode appeared at the rf power between 200 and 400 W. |
| 会议录 | REVIEW OF SCIENTIFIC INSTRUMENTS
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| 会议录出版者 | AMER INST PHYSICS |
| 会议录出版地 | CIRCULATION & FULFILLMENT DIV, 2 HUNTINGTON QUADRANGLE, STE 1 N O 1, MELVILLE, NY 11747-4501 USA |
| 语种 | 英语 |
| WOS研究方向 | Instruments & Instrumentation ; Physics |
| WOS记录号 | WOS:000275028400150 |
| 源URL | [http://119.78.100.186/handle/113462/57831]  |
| 专题 | 近代物理研究所_兰州重离子研究装置 |
| 通讯作者 | Miao, Ting-Ting |
| 作者单位 | 1.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Sun, Liang-Ting,Miao, Ting-Ting,Zhao, Hong-Wei,et al. The study of helicon plasma source[C]. 见:. |
入库方式： OAI收割
来源：近代物理研究所
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