三维多值非挥发存储器及其制备方法
文献类型:专利
作者 | 霍宗亮![]() ![]() ![]() ![]() ![]() ![]() |
发表日期 | 2014-04-22 |
专利号 | US8705274 |
著作权人 | 中国科学院微电子研究所 |
国家 | 美国 |
文献子类 | 发明专利 |
英文摘要 | The present disclosure relates to the field of microelectronics manufacture and memories. A three-dimensional multi-bit non-volatile memory and a method for manufacturing the same are disclosed. The memory comprises a plurality of memory cells constituting a memory array. The memory array may comprise: a gate stack structure; periodically and alternately arranged gate stack regions and channel region spaces; gate dielectric layers for discrete charge storage; periodically arranged channel regions; source doping regions and drain doping regions symmetrically arranged to each other; bit lines led from the source doping regions and the drain doping regions; and word lines led from the gate stack regions. The gate dielectric layers for discrete charge storage can provide physical storage spots to achieve single-bit or multi-bit operations, so as to achieve a high storage density. According to the present disclosure, the localized charge storage characteristic of the charge trapping layer and characteristics such as a longer effective channel length and a higher density of a vertical memory structure are utilized, to provide multiple storage spots in a single memory cell. Therefore, the storage density is improved while good performances such as high speed are ensured. |
公开日期 | 2012-01-05 |
申请日期 | 2011-06-30 |
语种 | 中文 |
源URL | [http://10.10.10.126/handle/311049/10389] ![]() |
专题 | 微电子研究所_微电子器件与集成技术重点实验室 |
作者单位 | 中国科学院微电子研究所 |
推荐引用方式 GB/T 7714 | 霍宗亮,朱晨昕,龙世兵,等. 三维多值非挥发存储器及其制备方法. US8705274. 2014-04-22. |
入库方式: OAI收割
来源:微电子研究所
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