中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
三维半导体存储器件及其制备方法

文献类型:专利

作者刘明; 霍宗亮
发表日期2015-04-07
专利号US9000409
著作权人中国科学院微电子研究所
国家美国
文献子类发明专利
英文摘要

The present application discloses a 3D semiconductor memory device having 1T1R memory configuration based on a vertical-type gate-around transistor, and a manufacturing method thereof. A on/off current ratio can be well controlled by changing a width and a length of a channel of the gate-around transistor, so as to facilitate multi-state operation of the 1T1R memory cell. Moreover, the vertical transistor has a smaller layout size than a horizontal transistor, so as to reduce the layout size effectively. Thus, the 3D semiconductor memory device can be integrated into an array with a high density.

公开日期2012-06-28
申请日期2011-06-30
语种中文
源URL[http://159.226.55.106/handle/172511/16058]  
专题微电子研究所_微电子器件与集成技术重点实验室
作者单位中国科学院微电子研究所
推荐引用方式
GB/T 7714
刘明,霍宗亮. 三维半导体存储器件及其制备方法. US9000409. 2015-04-07.

入库方式: OAI收割

来源:微电子研究所

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