中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
非挥发性阻变存储器件及其制备方法

文献类型:专利

作者刘琦; 刘明; 孙海涛; 张科科; 龙世兵; 吕杭炳; Writam Banerjee; 张康玮
发表日期2018-11-20
专利号US10134983
著作权人中国科学院微电子研究所
国家美国
文献子类发明专利
英文摘要

A nonvolatile resistive switching memory, comprising an inert metal electrode, a resistive switching functional layer, and an easily oxidizable metal electrode, and characterized in that: a graphene barrier layer is inserted between the inert metal electrode and the resistive switching functional layer, which is capable of preventing the easily oxidizable metal ions from migrating into the inert metal electrode through the resistive switching functional layer under the action of electric field during the programming of the device. The manufacturing method therefore comprises adding a monolayer or multilayer graphene thin film between the inert electrode and the solid-state electrolyte resistive switching functional layer which services as a metal ion barrier layer to stop electrically-conductive metal filaments formed in the resistive switching layer from diffusing into the inert electrode layer during a RRAM device programming process, eliminating erroneous programming phenomenon occurring during the erasing process, improving device reliability.

公开日期2016-08-11
申请日期2015-05-14
语种中文
源URL[http://159.226.55.107/handle/172511/18882]  
专题微电子研究所_微电子器件与集成技术重点实验室
作者单位中国科学院微电子研究所
推荐引用方式
GB/T 7714
刘琦,刘明,孙海涛,等. 非挥发性阻变存储器件及其制备方法. US10134983. 2018-11-20.

入库方式: OAI收割

来源:微电子研究所

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