非挥发性阻变存储器件及其制备方法
文献类型:专利
作者 | 刘琦![]() ![]() ![]() ![]() ![]() |
发表日期 | 2018-11-20 |
专利号 | US10134983 |
著作权人 | 中国科学院微电子研究所 |
国家 | 美国 |
文献子类 | 发明专利 |
英文摘要 | A nonvolatile resistive switching memory, comprising an inert metal electrode, a resistive switching functional layer, and an easily oxidizable metal electrode, and characterized in that: a graphene barrier layer is inserted between the inert metal electrode and the resistive switching functional layer, which is capable of preventing the easily oxidizable metal ions from migrating into the inert metal electrode through the resistive switching functional layer under the action of electric field during the programming of the device. The manufacturing method therefore comprises adding a monolayer or multilayer graphene thin film between the inert electrode and the solid-state electrolyte resistive switching functional layer which services as a metal ion barrier layer to stop electrically-conductive metal filaments formed in the resistive switching layer from diffusing into the inert electrode layer during a RRAM device programming process, eliminating erroneous programming phenomenon occurring during the erasing process, improving device reliability. |
公开日期 | 2016-08-11 |
申请日期 | 2015-05-14 |
语种 | 中文 |
源URL | [http://159.226.55.107/handle/172511/18882] ![]() |
专题 | 微电子研究所_微电子器件与集成技术重点实验室 |
作者单位 | 中国科学院微电子研究所 |
推荐引用方式 GB/T 7714 | 刘琦,刘明,孙海涛,等. 非挥发性阻变存储器件及其制备方法. US10134983. 2018-11-20. |
入库方式: OAI收割
来源:微电子研究所
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