In-depth evolution of chemical states and sub-10-nm-resolution crystal orientation mapping of nanograins in Ti(5 nm)/Au(20 nm)/Cr(3 nm) trilayer thin films
文献类型：期刊论文
| 作者 | xiaoli Zhu; Mateeo Todeschini; Alice Bastos da silva Fanta; Lintao Liu; Flemming Jensen; Henrijansen; Anpan Han; Peixiong shi; Anjie Ming; Changqing xie |
| 刊名 | Applied Surface Science
 |
| 出版日期 | 2018-05-17 |
| 文献子类 | 期刊论文 |
| 源URL | [http://159.226.55.107/handle/172511/18962]  |
| 专题 | 微电子研究所_微电子器件与集成技术重点实验室 |
| 推荐引用方式 GB/T 7714 | xiaoli Zhu,Mateeo Todeschini,Alice Bastos da silva Fanta,et al. In-depth evolution of chemical states and sub-10-nm-resolution crystal orientation mapping of nanograins in Ti(5 nm)/Au(20 nm)/Cr(3 nm) trilayer thin films[J]. Applied Surface Science,2018. |
| APA | xiaoli Zhu.,Mateeo Todeschini.,Alice Bastos da silva Fanta.,Lintao Liu.,Flemming Jensen.,...&Changqing xie.(2018).In-depth evolution of chemical states and sub-10-nm-resolution crystal orientation mapping of nanograins in Ti(5 nm)/Au(20 nm)/Cr(3 nm) trilayer thin films.Applied Surface Science. |
| MLA | xiaoli Zhu,et al."In-depth evolution of chemical states and sub-10-nm-resolution crystal orientation mapping of nanograins in Ti(5 nm)/Au(20 nm)/Cr(3 nm) trilayer thin films".Applied Surface Science (2018). |
入库方式： OAI收割
来源：微电子研究所
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