Direct wafer bonding of GaN-SiC for high power GaN-on-SiC devices
文献类型:期刊论文
作者 | Ran He; Fengwen Mu; Yinghui Wang; Tadatomo Suga |
刊名 | Acta Materialia
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出版日期 | 2018-09-25 |
源URL | [http://159.226.55.107/handle/172511/19030] ![]() |
专题 | 微电子研究所_智能感知研发中心 |
推荐引用方式 GB/T 7714 | Ran He,Fengwen Mu,Yinghui Wang,et al. Direct wafer bonding of GaN-SiC for high power GaN-on-SiC devices[J]. Acta Materialia,2018. |
APA | Ran He,Fengwen Mu,Yinghui Wang,&Tadatomo Suga.(2018).Direct wafer bonding of GaN-SiC for high power GaN-on-SiC devices.Acta Materialia. |
MLA | Ran He,et al."Direct wafer bonding of GaN-SiC for high power GaN-on-SiC devices".Acta Materialia (2018). |
入库方式: OAI收割
来源:微电子研究所
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