一种石墨烯器件及其制造方法
文献类型:专利
作者 | 刘新宇![]() ![]() ![]() ![]() ![]() ![]() |
发表日期 | 2014-04-22 |
专利号 | US8703558 |
著作权人 | 中国科学院微电子研究所 |
国家 | 美国 |
文献子类 | 发明专利 |
英文摘要 | The invention provides a graphene device structure and a method for manufacturing the same, the device structure comprising a graphene layer; a gate region in contact with the graphene layer; semiconductor doped regions formed in the two opposite sides of the gate region and in contact with the graphene layer, wherein the semiconductor doped regions are isolated from the gate region; a contact formed on the gate region and contacts formed on the semiconductor doped regions. The on-off ratio of the graphene device is increased through the semiconductor doped regions without increasing the band gap of the graphene material, i.e., without affecting the mobility of the material or the speed of the device, thereby increasing the applicability of the graphene material in CMOS devices. |
公开日期 | 2012-03-22 |
申请日期 | 2010-09-17 |
语种 | 中文 |
源URL | [http://10.10.10.126/handle/311049/13240] ![]() |
专题 | 微电子研究所_集成电路先导工艺研发中心 |
作者单位 | 中国科学院微电子研究所 |
推荐引用方式 GB/T 7714 | 刘新宇,梁擎擎,金智,等. 一种石墨烯器件及其制造方法. US8703558. 2014-04-22. |
入库方式: OAI收割
来源:微电子研究所
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