中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
一种石墨烯器件及其制造方法

文献类型:专利

作者刘新宇; 梁擎擎; 金智; 王文武; 钟汇才; 朱慧珑
发表日期2014-04-22
专利号US8703558
著作权人中国科学院微电子研究所
国家美国
文献子类发明专利
英文摘要

The invention provides a graphene device structure and a method for manufacturing the same, the device structure comprising a graphene layer; a gate region in contact with the graphene layer; semiconductor doped regions formed in the two opposite sides of the gate region and in contact with the graphene layer, wherein the semiconductor doped regions are isolated from the gate region; a contact formed on the gate region and contacts formed on the semiconductor doped regions. The on-off ratio of the graphene device is increased through the semiconductor doped regions without increasing the band gap of the graphene material, i.e., without affecting the mobility of the material or the speed of the device, thereby increasing the applicability of the graphene material in CMOS devices.

公开日期2012-03-22
申请日期2010-09-17
语种中文
源URL[http://10.10.10.126/handle/311049/13240]  
专题微电子研究所_集成电路先导工艺研发中心
作者单位中国科学院微电子研究所
推荐引用方式
GB/T 7714
刘新宇,梁擎擎,金智,等. 一种石墨烯器件及其制造方法. US8703558. 2014-04-22.

入库方式: OAI收割

来源:微电子研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。