Junction Control by Carbon and Phosphorus Co-Implantation in Pre-Amorphized Germanium
文献类型：期刊论文
| 作者 | Liu JB(刘金彪) ; Luo J(罗军); Eddy Simoen; Yang F(杨芳); Wang GL(王桂磊); Wang WW(王文武); Chen DP(陈大鹏); Li JF(李俊峰); Zhao C(赵超)
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| 刊名 | ECS Journal of Solid state science and tehchnology
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| 出版日期 | 2016 |
| 文献子类 | 期刊论文 |
| 源URL | [http://159.226.55.106/handle/172511/16196]  |
| 专题 | 微电子研究所_集成电路先导工艺研发中心 |
| 作者单位 | 中国科学院微电子研究所 |
| 推荐引用方式 GB/T 7714 | Liu JB,Luo J,Eddy Simoen,et al. Junction Control by Carbon and Phosphorus Co-Implantation in Pre-Amorphized Germanium[J]. ECS Journal of Solid state science and tehchnology,2016. |
| APA | Liu JB.,Luo J.,Eddy Simoen.,Yang F.,Wang GL.,...&Zhao C.(2016).Junction Control by Carbon and Phosphorus Co-Implantation in Pre-Amorphized Germanium.ECS Journal of Solid state science and tehchnology. |
| MLA | Liu JB,et al."Junction Control by Carbon and Phosphorus Co-Implantation in Pre-Amorphized Germanium".ECS Journal of Solid state science and tehchnology (2016). |
入库方式： OAI收割
来源：微电子研究所
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