Study of Silicon Pixel Sensor for Synchrotron Radiation Detection
文献类型：期刊论文
| 作者 | Li ZJ(李贞杰); Jia YC(贾云丛) |
| 刊名 | Chinese Physics C
 |
| 出版日期 | 2016-05-01 |
| 文献子类 | 期刊论文 |
| 英文摘要 | The silicon pixel sensor (SPS) is one of the key components of hybrid pixel single-photon-counting detectors for synchrotron radiation X-ray detection (SRD). In this paper, the design, fabrication, and characterization of SPSs for single beam X-ray photon detection is reported. The designed pixel sensor is p+-in-n structure with guardring structures operated in full-depletion mode and is fabricated on 4-inch, N type, 320 μm thick, high-resistivity silicon wafers by a general Si planar process. |
| 源URL | [http://159.226.55.106/handle/172511/16225]  |
| 专题 | 微电子研究所_集成电路先导工艺研发中心 |
| 推荐引用方式 GB/T 7714 | Li ZJ,Jia YC. Study of Silicon Pixel Sensor for Synchrotron Radiation Detection[J]. Chinese Physics C,2016. |
| APA | 李贞杰,&贾云丛.(2016).Study of Silicon Pixel Sensor for Synchrotron Radiation Detection.Chinese Physics C. |
| MLA | 李贞杰,et al."Study of Silicon Pixel Sensor for Synchrotron Radiation Detection".Chinese Physics C (2016). |
入库方式： OAI收割
来源：微电子研究所
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