Edge-contact formed by oxygen plasma and rapid thermal annealing to improve metal-graphene contact resistance
文献类型：期刊论文
| 作者 | Su YJ(粟雅娟) ; Luo J(罗军); Zhu HL(朱慧珑); Wei YY(韦亚一); Yan XY(闫祥宇); Jia KP(贾昆鹏); Yuanjun Ma
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| 刊名 | ECS Journal of Solid State Science and Technology
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| 出版日期 | 2018-02-02 |
| 文献子类 | 期刊论文 |
| 源URL | [http://159.226.55.107/handle/172511/19067]  |
| 专题 | 微电子研究所_集成电路先导工艺研发中心 |
| 作者单位 | 中国科学院微电子研究所 |
| 推荐引用方式 GB/T 7714 | Su YJ,Luo J,Zhu HL,et al. Edge-contact formed by oxygen plasma and rapid thermal annealing to improve metal-graphene contact resistance[J]. ECS Journal of Solid State Science and Technology,2018. |
| APA | Su YJ.,Luo J.,Zhu HL.,Wei YY.,Yan XY.,...&Yuanjun Ma.(2018).Edge-contact formed by oxygen plasma and rapid thermal annealing to improve metal-graphene contact resistance.ECS Journal of Solid State Science and Technology. |
| MLA | Su YJ,et al."Edge-contact formed by oxygen plasma and rapid thermal annealing to improve metal-graphene contact resistance".ECS Journal of Solid State Science and Technology (2018). |
入库方式： OAI收割
来源：微电子研究所
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