A Novel High Volume Manufacturing Method for Defect-free and High-yield SiN Micro-sieve Membranes
文献类型：期刊论文
| 作者 | Zhao C(赵超) ; Wei YY(韦亚一); Chen R(陈睿); Dong LS(董立松); Liu YS(刘艳松)
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| 刊名 | Journal of Microelectronic Manufacturing
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| 出版日期 | 2018-09-30 |
| 文献子类 | 期刊论文 |
| 源URL | [http://159.226.55.107/handle/172511/19068]  |
| 专题 | 微电子研究所_集成电路先导工艺研发中心 |
| 作者单位 | 中国科学院微电子研究所 |
| 推荐引用方式 GB/T 7714 | Zhao C,Wei YY,Chen R,et al. A Novel High Volume Manufacturing Method for Defect-free and High-yield SiN Micro-sieve Membranes[J]. Journal of Microelectronic Manufacturing,2018. |
| APA | Zhao C,Wei YY,Chen R,Dong LS,&Liu YS.(2018).A Novel High Volume Manufacturing Method for Defect-free and High-yield SiN Micro-sieve Membranes.Journal of Microelectronic Manufacturing. |
| MLA | Zhao C,et al."A Novel High Volume Manufacturing Method for Defect-free and High-yield SiN Micro-sieve Membranes".Journal of Microelectronic Manufacturing (2018). |
入库方式： OAI收割
来源：微电子研究所
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