Fast optical proximity correction method based on nonlinear compressive sensing
文献类型：期刊论文
| 作者 | Xu Ma; Javier Garcia-Frias; Lisong Dong; Gonzalor.Arce; YanQiu Li; Zhiqiang Wang |
| 刊名 | Optics Express
 |
| 出版日期 | 2018-05-28 |
| 文献子类 | 期刊论文 |
| 源URL | [http://159.226.55.107/handle/172511/19070]  |
| 专题 | 微电子研究所_集成电路先导工艺研发中心 |
| 推荐引用方式 GB/T 7714 | Xu Ma,Javier Garcia-Frias,Lisong Dong,et al. Fast optical proximity correction method based on nonlinear compressive sensing[J]. Optics Express,2018. |
| APA | Xu Ma,Javier Garcia-Frias,Lisong Dong,Gonzalor.Arce,YanQiu Li,&Zhiqiang Wang.(2018).Fast optical proximity correction method based on nonlinear compressive sensing.Optics Express. |
| MLA | Xu Ma,et al."Fast optical proximity correction method based on nonlinear compressive sensing".Optics Express (2018). |
入库方式： OAI收割
来源：微电子研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。