Study of cavity effect in micro-Pirani gauge chamber with improved sensitivity for high vacuum regime
文献类型：期刊论文
| 作者 | Ye YX(叶雨欣); Yun SC(云世昌); Jiao BB(焦斌斌); Kong YM(孔延梅); Lai JH(赖俊桦); Guohe Zhang |
| 刊名 | AIP ADVANCE
 |
| 出版日期 | 2018-05-29 |
| 文献子类 | 期刊论文 |
| 源URL | [http://159.226.55.107/handle/172511/19075]  |
| 专题 | 微电子研究所_集成电路先导工艺研发中心 |
| 推荐引用方式 GB/T 7714 | Ye YX,Yun SC,Jiao BB,et al. Study of cavity effect in micro-Pirani gauge chamber with improved sensitivity for high vacuum regime[J]. AIP ADVANCE,2018. |
| APA | 叶雨欣,云世昌,焦斌斌,孔延梅,赖俊桦,&Guohe Zhang.(2018).Study of cavity effect in micro-Pirani gauge chamber with improved sensitivity for high vacuum regime.AIP ADVANCE. |
| MLA | 叶雨欣,et al."Study of cavity effect in micro-Pirani gauge chamber with improved sensitivity for high vacuum regime".AIP ADVANCE (2018). |
入库方式： OAI收割
来源：微电子研究所
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