Research on ion implantation in MEMS device fabrication by theory, simulation and experiments
文献类型：期刊论文
| 作者 | Minyu Bai; Lei Wang; Guodong Zhang; Lingjian Zhu; Binbin Jiao; Yulong Zhao |
| 刊名 | INTERNATIONAL JOURNAL OF MODERN PHYSICS B
 |
| 出版日期 | 2018-11-07 |
| 文献子类 | 期刊论文 |
| 源URL | [http://159.226.55.107/handle/172511/19077]  |
| 专题 | 微电子研究所_集成电路先导工艺研发中心 |
| 推荐引用方式 GB/T 7714 | Minyu Bai,Lei Wang,Guodong Zhang,et al. Research on ion implantation in MEMS device fabrication by theory, simulation and experiments[J]. INTERNATIONAL JOURNAL OF MODERN PHYSICS B,2018. |
| APA | Minyu Bai,Lei Wang,Guodong Zhang,Lingjian Zhu,Binbin Jiao,&Yulong Zhao.(2018).Research on ion implantation in MEMS device fabrication by theory, simulation and experiments.INTERNATIONAL JOURNAL OF MODERN PHYSICS B. |
| MLA | Minyu Bai,et al."Research on ion implantation in MEMS device fabrication by theory, simulation and experiments".INTERNATIONAL JOURNAL OF MODERN PHYSICS B (2018). |
入库方式： OAI收割
来源：微电子研究所
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