A Study of High-Low Frequency Charge Pumping Method on Evaluating Interface Traps in Bulk FinFETs
文献类型：期刊论文
| 作者 | Ying Jin; Yangyu Tian; Kun Chen; Jun Luo |
| 刊名 | ECS Journal of Solid State Science and Technology
 |
| 出版日期 | 2018-01-24 |
| 文献子类 | 期刊论文 |
| 源URL | [http://159.226.55.107/handle/172511/19185]  |
| 专题 | 微电子研究所_集成电路先导工艺研发中心 |
| 推荐引用方式 GB/T 7714 | Ying Jin,Yangyu Tian,Kun Chen,et al. A Study of High-Low Frequency Charge Pumping Method on Evaluating Interface Traps in Bulk FinFETs[J]. ECS Journal of Solid State Science and Technology,2018. |
| APA | Ying Jin,Yangyu Tian,Kun Chen,&Jun Luo.(2018).A Study of High-Low Frequency Charge Pumping Method on Evaluating Interface Traps in Bulk FinFETs.ECS Journal of Solid State Science and Technology. |
| MLA | Ying Jin,et al."A Study of High-Low Frequency Charge Pumping Method on Evaluating Interface Traps in Bulk FinFETs".ECS Journal of Solid State Science and Technology (2018). |
入库方式： OAI收割
来源：微电子研究所
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