High-mode resonant piezoresistive cantilever sensors for tens-femtogram resoluble mass sensing in air
文献类型：期刊论文
| 作者 | Jin, DZ ; Li, XX ; Liu, J ; Zuo, GM ; Wang, YL ; Liu, M ; Yu, HT |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2006-01-01 |
| 卷号 | 16期号:5页码:1017-1023 |
| 关键词 | FREQUENCY STABILITY MICROCANTILEVERS SYSTEMS TRANSDUCERS GAS |
| ISSN号 | 0960-1317 |
| 通讯作者 | Li, XX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-11-08 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/17303]  |
| 专题 | 上海微系统与信息技术研究所_太赫兹、微波射频技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Jin, DZ,Li, XX,Liu, J,et al. High-mode resonant piezoresistive cantilever sensors for tens-femtogram resoluble mass sensing in air[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2006,16(5):1017-1023. |
| APA | Jin, DZ.,Li, XX.,Liu, J.,Zuo, GM.,Wang, YL.,...&Yu, HT.(2006).High-mode resonant piezoresistive cantilever sensors for tens-femtogram resoluble mass sensing in air.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,16(5),1017-1023. |
| MLA | Jin, DZ,et al."High-mode resonant piezoresistive cantilever sensors for tens-femtogram resoluble mass sensing in air".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 16.5(2006):1017-1023. |
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