硅微压电传声器的研究
文献类型：学位论文
| 作者 | 杨楚威 |
| 学位类别 | 博士 |
| 答辩日期 | 2003 |
| 授予单位 | 中国科学院声学研究所 |
| 授予地点 | 中国科学院声学研究所 |
| 关键词 | 硅微压电传声器 氧化锌 压电薄膜 微机电系统 |
| 中文摘要 | 硅微压电传声器是一种可应用于电声、超声和水声的微传感器。但是现今硅微压电传声器的灵敏度较低，本文为了提高灵敏度，同时也为了提高成品率，提出了三种结构上的改进：1）用较厚的复合基底膜代替单层膜。2）电极由单电极改为分割的串联电极结构。3）用圆形振动膜代替方形振动膜。这些改进都在不同程度上提高了灵敏度，尤其是我们制备的串联电极圆形振动膜硅微压电传声器，比过去一般的单电极方形振动膜硅微压电传声器灵敏度提高了30dB（ref．1V/Pa）。而成品率由30％提高到超过90％。本文中硅微压电传声器的压电薄膜采用氧化锌薄膜，基底膜采用氮化硅或者氮化硅／氧化硅／氮化硅复合膜。本文还进行了各种结构的硅微压电传声器的工艺实验及其实现。我们提出并实现了在硅基底上形成圆形振动膜这种独特结构的工艺，突破了硅微传声器只能采用矩形振动膜的限制。我们对设计制备的各种结构硅微压电传声器进行了封装，分别进行了电声性能测试，在这几种结构中，测得的灵敏度最高的是串联电极圆形振动膜硅微压电传声器，可达到约-70dB（ref．1V/Pa）。本文还对圆形振动膜硅微压电传声器做了理论分析，发现在硅微压电传声器的情况下，必须考虑传声器中张力的影响。在考虑振动膜受张力控制条件下，其理论灵敏度与实验结果比较吻合。 |
| 英文摘要 | Silicon based piezoelectric thin film microphone is a micro acoustic sensor which could be used in electroacoustics, ultrasonics and underwater acoustics. The sensitivity of general silicon based piezoelectric microphones is relatively low, to increase the sensitivity, and the ratio of finished products, three improvements of structures were presented. 1) Thickening underlying film. 2) Segmenting electrodes in series. 3) Fabricating circular-supporting vibrating film. All of these improvements especially the circular-supporting vibrating film increased the sensitivities. The sensitivity of circular-supporting vibrating film microphone was 30 dB (ref. 1 V/Pa) higher than that of general one, and the ratio of finished product improved from 30% to more than 90%. The piezoelectric films of the silicon based microphones were made of ZnO thin film, and the underlying films were made of S13N4 film or SiaNVSiCVSis^ composite film. All the microphones which had various structures were fabricated. We presented and realized the unique techniques of circular-supporting vibrating film structure firstly, which broke the rectangle supporting film limitation of silicon microphone. The microphones were encapsulated to meet the electro-acoustic measuring requirement, and the electro-acoustic characters were measured. The highest sensitivity of all the microphones was that of circular-supporting vibrating film silicon based piezoelectric film microphone which electrodes was in series. The sensitivity achieved about -70 dB (ref. 1 V/Pa). The sensitivity of silicon based circular-supporting vibrating film piezoelectric microphone was theoretically analyzed. We found that the stress could not be ignored under the silicon microphone conditions. The theoretical sensitivity of the microphone which was controlled by stress agreed with that of the measuring one. |
| 语种 | 中文 |
| 公开日期 | 2011-05-07 |
| 页码 | 76 |
| 源URL | [http://159.226.59.140/handle/311008/1072]  |
| 专题 | 声学研究所_声学所博硕士学位论文_1981-2009博硕士学位论文 |
| 推荐引用方式 GB/T 7714 | 杨楚威. 硅微压电传声器的研究[D]. 中国科学院声学研究所. 中国科学院声学研究所. 2003. |
入库方式： OAI收割
来源：声学研究所
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