(Ga,Mn,N) Compounds Growth with Mass-Analyzed Low Energy Dual Ion Beam Deposition
文献类型：期刊论文
| 作者 | Zhang FQ(张富强); Chen NF(陈诺夫) ; Liu XL; Liu ZK; Yang SY; Chai CL
|
| 刊名 | Journal of Crystal Growth
 |
| 出版日期 | 2003 |
| 卷号 | 252期号:1-3页码:202-207 |
| ISSN号 | 0022-0248 |
| 中文摘要 | The (Ga,Mn,N) samples were grown by the implantation of low-energy Mn ions into GaN/Al2O3 substrate at different elevated substrate temperatures with mass-analyzed low-energy dual ion beam deposition system. Auger electron spectroscopy depth profile of samples grown at different substrate temperatures indicates that the Mn ions reach deeper in samples with higher substrate temperatures. Clear X-ray diffraction peak from (Ga,Mn)N is observed in samples grown at the higher substrate temperature. It indicates that under optimized substrate temperature and annealing conditions the solid solution (Ga,Mn)N phase in samples was formed with the same lattice structure as GaN and different lattice constant. |
| 学科主题 | 力学 |
| 类目[WOS] | Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied |
| 研究领域[WOS] | Crystallography ; Materials Science ; Physics |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000182145400030 |
| 公开日期 | 2007-06-15 ; 2007-12-05 ; 2009-06-23 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/15620]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Zhang FQ,Chen NF,Liu XL,et al. (Ga,Mn,N) Compounds Growth with Mass-Analyzed Low Energy Dual Ion Beam Deposition[J]. Journal of Crystal Growth,2003,252(1-3):202-207. |
| APA | 张富强,陈诺夫,Liu XL,Liu ZK,Yang SY,&Chai CL.(2003).(Ga,Mn,N) Compounds Growth with Mass-Analyzed Low Energy Dual Ion Beam Deposition.Journal of Crystal Growth,252(1-3),202-207. |
| MLA | 张富强,et al."(Ga,Mn,N) Compounds Growth with Mass-Analyzed Low Energy Dual Ion Beam Deposition".Journal of Crystal Growth 252.1-3(2003):202-207. |
入库方式： OAI收割
来源：力学研究所
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