SIS Mixer Fabrication for ALMA Band10
文献类型：期刊论文
| 作者 | Kroug, Matthias1; Endo, A.1; Tamura, T.1; Noguchi, T.1; Kojima, T.1; Uzawa, Y.1; Takeda, M.2; Wang, Z.2 ; Shan, W.3
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| 刊名 | IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
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| 出版日期 | 2009-06-01 |
| 卷号 | 19期号:3页码:171-173 |
| 关键词 | ICP etching SIS mixer submillimeter wave receiver |
| ISSN号 | 1051-8223 |
| 英文摘要 | Band10 of the Atacama Large Millimeter Array (ALMA) is a planned heterodyne receiver covering the frequency range 790 GHz-950 GHz. The waveguide mixers are superconductor insulator superconductor (SIS) Nb/Al - AlO(x)/Nb junctions integrated with NbTiN/SiO(2)/Al tuning circuits. Our junction definition process has been greatly simplified by introducing an inductively-coupled-plasma (ICP) etcher to the fabrication. The etching process, which employs a low-pressure CF(4)/O(2) plasma, allows to remove the entire Nb/Al - AlO(x)/Nb tri-layer in a single step. SIS mixers with current densities up to 10 kA/cm(2) and quality factor above 15 have been fabricated with good reproducibility. Minimum receiver noise temperature, corrected for optical losses, is 210 K at 860 GHz. With the goal to further improve the performance, optimization of circuit design and fabrication technology are discussed. |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 学科主题 | Engineering; Physics |
| 类目[WOS] | Engineering, Electrical & Electronic ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Physics |
| 关键词[WOS] | JUNCTIONS |
| 收录类别 | SCI ; ISTP |
| 语种 | 英语 |
| WOS记录号 | WOS:000268282000011 |
| 公开日期 | 2011-12-08 |
| 源URL | [http://159.226.72.40/handle/332002/1691]  |
| 专题 | 紫金山天文台_毫米波和亚毫米波技术实验室 |
| 作者单位 | 1.Natl Inst Nat Sci, Natl Astron Observ Japan, Mitaka, Tokyo 1818588, Japan 2.Natl Inst Informat & Commun Technol, Kobe, Hyogo, Japan 3.Acad Sinica, Purple Mt Observ, Nanjing 210008, Peoples R China |
| 推荐引用方式 GB/T 7714 | Kroug, Matthias,Endo, A.,Tamura, T.,et al. SIS Mixer Fabrication for ALMA Band10[J]. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,2009,19(3):171-173. |
| APA | Kroug, Matthias.,Endo, A..,Tamura, T..,Noguchi, T..,Kojima, T..,...&Shan, W..(2009).SIS Mixer Fabrication for ALMA Band10.IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,19(3),171-173. |
| MLA | Kroug, Matthias,et al."SIS Mixer Fabrication for ALMA Band10".IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY 19.3(2009):171-173. |
入库方式： OAI收割
来源：紫金山天文台
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