25 Gbit/s silicon microring modulator based on misalignment-tolerant interleaved PN junctions
文献类型：期刊论文
| ; | |
| 作者 | Xiao X(肖希); Xu H(徐浩); Li XY(李显尧); Hu YT(胡应涛); Xiong K(熊康); Li ZY(李智勇); Chu T(储涛); Yu YD(俞育德); Yu JZ(余金中) |
| 刊名 | optics express
 ; Optics Express
|
| 出版日期 | 2012-01 ; 2012-01 |
| 卷号 | 3期号:20页码:2507-2515 |
| 关键词 | silicon photonics Silicon Photonics |
| 通讯作者 | xiao x(肖希) |
| 合作状况 | 其它 |
| 英文摘要 | A high-speed depletion-mode silicon-based microring modulator with interleaved PN junctions optimized for high modulation efficiency and large alignment tolerance is demonstrated. It is fabricated using standard 0.18 μm complementary metal–oxide–semiconductor processes and provides low VπLπs of 0.68 V·cm to 1.64 V·cm with a moderate doping concentration of 2 × 1017 cm-3. The measured modulation efficiency decreases by only 12.4% under ± 150 nm alignment errors. 25 Gbit/s non-return-zero modulation with a 4.5 dB extinction ratio is experimentally realized at a peak-to-peak driving voltage of 2 V, demonstrating the excellent performance of the novel doping profile. |
| 学科主题 | 半导体器件 ; 光电子学 ; 半导体器件 ; 光电子学 |
| 收录类别 | SCI |
| 公开日期 | 2012-02-09 ; 2012-02-09 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/22876]  |
| 专题 | 半导体研究所_光电子研究发展中心 |
| 通讯作者 | Xiao X(肖希) |
| 推荐引用方式 GB/T 7714 | Xiao X,Xu H,Li XY,et al. 25 Gbit/s silicon microring modulator based on misalignment-tolerant interleaved PN junctions, 25 Gbit/s silicon microring modulator based on misalignment-tolerant interleaved PN junctions[J]. optics express, Optics Express,2012, 2012,3, 3(20):2507-2515, 2507-2515. |
| APA | Xiao X.,Xu H.,Li XY.,Hu YT.,Xiong K.,...&Yu JZ.(2012).25 Gbit/s silicon microring modulator based on misalignment-tolerant interleaved PN junctions.optics express,3(20),2507-2515. |
| MLA | Xiao X,et al."25 Gbit/s silicon microring modulator based on misalignment-tolerant interleaved PN junctions".optics express 3.20(2012):2507-2515. |
入库方式： OAI收割
来源：半导体研究所
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