Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection
文献类型：期刊论文
| 作者 | Chen X ; Fan ZC ; Xu Y ; Song GF ; Chen LH |
| 刊名 | microelectronic engineering
 |
| 出版日期 | 2011 |
| 卷号 | 88期号:9页码:2889-2893 |
| 关键词 | INTERFERENCE LITHOGRAPHY PHOTORESIST GRATINGS PROFILE LIGHT NANOSTRUCTURES REFLECTION REDUCTION ARRAY SI |
| ISSN号 | 0167-9317 |
| 通讯作者 | chen, x (reprint author), chinese acad sci, inst semicond, nanooptoelect lab, beijing 100083, peoples r china, chenxi@semi.ac.cn ; chenlh@semi.ac.cn |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 资助信息 | national natural science foundation of china[60636030, 60707009, 60906027, 60906028]; beijing natural science foundation[4112058] |
| 语种 | 英语 |
| 公开日期 | 2012-02-06 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/22745]  |
| 专题 | 半导体研究所_纳米光电子实验室 |
| 推荐引用方式 GB/T 7714 | Chen X,Fan ZC,Xu Y,et al. Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection[J]. microelectronic engineering,2011,88(9):2889-2893. |
| APA | Chen X,Fan ZC,Xu Y,Song GF,&Chen LH.(2011).Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection.microelectronic engineering,88(9),2889-2893. |
| MLA | Chen X,et al."Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection".microelectronic engineering 88.9(2011):2889-2893. |
入库方式： OAI收割
来源：半导体研究所
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