Preparation of Silica Abrasives from Water Glass and Application in Silicon Wafer Polishing
文献类型：期刊论文
| 作者 | Hu,XK ; Song,ZT ; Wang,HB ; Liu,WL ; Qin,F ; Zhang,ZF |
| 刊名 | POWDER TECHNOLOGY AND APPLICATION II
 |
| 出版日期 | 2010 |
| 卷号 | 92页码:183-187 |
| 关键词 | CHEMICAL-MECHANICAL PLANARIZATION SOL-GEL METHOD COLLOIDAL SILICA PARTICLES SLURRY |
| ISSN号 | 1022-6680 |
| 通讯作者 | Hu, XK, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Lab Nanotechnol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science, Multidisciplinary |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/94655]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Hu,XK,Song,ZT,Wang,HB,et al. Preparation of Silica Abrasives from Water Glass and Application in Silicon Wafer Polishing[J]. POWDER TECHNOLOGY AND APPLICATION II,2010,92:183-187. |
| APA | Hu,XK,Song,ZT,Wang,HB,Liu,WL,Qin,F,&Zhang,ZF.(2010).Preparation of Silica Abrasives from Water Glass and Application in Silicon Wafer Polishing.POWDER TECHNOLOGY AND APPLICATION II,92,183-187. |
| MLA | Hu,XK,et al."Preparation of Silica Abrasives from Water Glass and Application in Silicon Wafer Polishing".POWDER TECHNOLOGY AND APPLICATION II 92(2010):183-187. |
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