Surface modification of ceria nanoparticles and their chemical mechanical polishing behavior on glass substrate
文献类型：期刊论文
| 作者 | Zhang, ZF ; Yu, L ; Liu, WL ; Song, ZT |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2010 |
| 卷号 | 256期号:12页码:3856-3861 |
| 关键词 | CEO2 NANOPARTICLES ABRASIVE PARTICLES PERFORMANCE SILICA SLURRY OXIDE |
| ISSN号 | 0169-4332 |
| 通讯作者 | Liu, WL, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Lab Nanotechnol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/94703]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, ZF,Yu, L,Liu, WL,et al. Surface modification of ceria nanoparticles and their chemical mechanical polishing behavior on glass substrate[J]. APPLIED SURFACE SCIENCE,2010,256(12):3856-3861. |
| APA | Zhang, ZF,Yu, L,Liu, WL,&Song, ZT.(2010).Surface modification of ceria nanoparticles and their chemical mechanical polishing behavior on glass substrate.APPLIED SURFACE SCIENCE,256(12),3856-3861. |
| MLA | Zhang, ZF,et al."Surface modification of ceria nanoparticles and their chemical mechanical polishing behavior on glass substrate".APPLIED SURFACE SCIENCE 256.12(2010):3856-3861. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。