Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement
文献类型：期刊论文
| 作者 | Bao, XQ ; Dargent, T ; Cattan, E |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2010 |
| 卷号 | 20期号:2页码:25005-25005 |
| 关键词 | FABRICATION MICROSTRUCTURES LITHOGRAPHY CHANNELS EXPOSURE MOLD |
| ISSN号 | 0960-1317 |
| 通讯作者 | Bao, XQ, CNRS, UMR 8520, F-59650 Villeneuve Dascq, France |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/94708]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Bao, XQ,Dargent, T,Cattan, E. Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2010,20(2):25005-25005. |
| APA | Bao, XQ,Dargent, T,&Cattan, E.(2010).Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,20(2),25005-25005. |
| MLA | Bao, XQ,et al."Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 20.2(2010):25005-25005. |
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