Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate
文献类型：期刊论文
| 作者 | Zhang, ZF ; Liu, WL ; Zhu, JK ; Song, ZT |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2010 |
| 卷号 | 257期号:5页码:1750-1755 |
| 关键词 | CMP BEHAVIOR SURFACE MODIFICATION NANO-ABRASIVES GENERAL-METHOD NANOPARTICLES OXIDE STABILITY |
| ISSN号 | 0169-4332 |
| 通讯作者 | Zhang, ZF, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Lab Nanotechnol, Shanghai 200050, Peoples R China |
| 学科主题 | Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/94742]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, ZF,Liu, WL,Zhu, JK,et al. Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate[J]. APPLIED SURFACE SCIENCE,2010,257(5):1750-1755. |
| APA | Zhang, ZF,Liu, WL,Zhu, JK,&Song, ZT.(2010).Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate.APPLIED SURFACE SCIENCE,257(5),1750-1755. |
| MLA | Zhang, ZF,et al."Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate".APPLIED SURFACE SCIENCE 257.5(2010):1750-1755. |
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