A wafer-scale packaging structure with monolithic microwave integrated circuits and passives embedded in a silicon substrate for multichip modules for radio frequency applications
文献类型:期刊论文
作者 | Geng, F ; Ding, XY ; Xu, GW ; Luo, L |
刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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出版日期 | 2009 |
卷号 | 19期号:10页码:105011-105011 |
关键词 | HIGH-DENSITY INTERCONNECT BCB |
ISSN号 | 0960-1317 |
通讯作者 | Geng, F, Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China |
学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2012-03-24 |
源URL | [http://ir.sim.ac.cn/handle/331004/94772] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
推荐引用方式 GB/T 7714 | Geng, F,Ding, XY,Xu, GW,et al. A wafer-scale packaging structure with monolithic microwave integrated circuits and passives embedded in a silicon substrate for multichip modules for radio frequency applications[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2009,19(10):105011-105011. |
APA | Geng, F,Ding, XY,Xu, GW,&Luo, L.(2009).A wafer-scale packaging structure with monolithic microwave integrated circuits and passives embedded in a silicon substrate for multichip modules for radio frequency applications.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,19(10),105011-105011. |
MLA | Geng, F,et al."A wafer-scale packaging structure with monolithic microwave integrated circuits and passives embedded in a silicon substrate for multichip modules for radio frequency applications".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 19.10(2009):105011-105011. |
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