Study of silicon-on-insulator substrates incorporated with buried MoSi2 layer
文献类型：期刊论文
| 作者 | Chen, C ; Liu, WL ; Ma, XB ; Shen, QW ; Song, ZT ; Lin, CL |
| 刊名 | THIN SOLID FILMS
 |
| 出版日期 | 2009 |
| 卷号 | 517期号:8页码:2724-2728 |
| 关键词 | THIN-FILMS RESISTIVITY SILICIDES |
| ISSN号 | 0040-6090 |
| 通讯作者 | Liu, WL, Chinese Acad Sci, Nano Technol Lab, SIMIT, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science, Multidisciplinary; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/94806]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Chen, C,Liu, WL,Ma, XB,et al. Study of silicon-on-insulator substrates incorporated with buried MoSi2 layer[J]. THIN SOLID FILMS,2009,517(8):2724-2728. |
| APA | Chen, C,Liu, WL,Ma, XB,Shen, QW,Song, ZT,&Lin, CL.(2009).Study of silicon-on-insulator substrates incorporated with buried MoSi2 layer.THIN SOLID FILMS,517(8),2724-2728. |
| MLA | Chen, C,et al."Study of silicon-on-insulator substrates incorporated with buried MoSi2 layer".THIN SOLID FILMS 517.8(2009):2724-2728. |
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