Porous alumina nano-membranes: Soft replica molding for large area UV-nanoimprint lithography
文献类型：期刊论文
| 作者 | Zhou, WM ; Niu, XM ; Min, GQ ; Song, ZT ; Zhang, J ; Liu, YB ; Li, XL ; Zhang, JP ; Feng, SL |
| 刊名 | MICROELECTRONIC ENGINEERING
 |
| 出版日期 | 2009 |
| 卷号 | 86期号:12页码:2375-2380 |
| 关键词 | HIGH-RESOLUTION FABRICATION ARRAYS DENSITY |
| ISSN号 | 0167-9317 |
| 通讯作者 | Zhou, WM, Nanotechnol Promot Ctr SNPC, Shanghai 200237, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Optics; Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/94872]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhou, WM,Niu, XM,Min, GQ,et al. Porous alumina nano-membranes: Soft replica molding for large area UV-nanoimprint lithography[J]. MICROELECTRONIC ENGINEERING,2009,86(12):2375-2380. |
| APA | Zhou, WM.,Niu, XM.,Min, GQ.,Song, ZT.,Zhang, J.,...&Feng, SL.(2009).Porous alumina nano-membranes: Soft replica molding for large area UV-nanoimprint lithography.MICROELECTRONIC ENGINEERING,86(12),2375-2380. |
| MLA | Zhou, WM,et al."Porous alumina nano-membranes: Soft replica molding for large area UV-nanoimprint lithography".MICROELECTRONIC ENGINEERING 86.12(2009):2375-2380. |
入库方式： OAI收割
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