LATTICE DEFORMATION AND IMPURITY LOCATION OF BI IMPLANTED SI INDUCED BY PULSED LASER ANNEALING
文献类型：期刊论文
| 作者 | CAO, DX ; CHU, TC ; ZHOU, ZY ; DAI, RZ ; HU, JZ ; DEUTCH, BI |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH
 |
| 出版日期 | 1981 |
| 卷号 | 191期号:1-3页码:54-58 |
| ISSN号 | 0029-554X |
| 通讯作者 | CAO, DX, CHINESE ACAD SCI,SHANGHAI INST NUCL RES,SHANGHAI,PEOPLES R CHINA |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology |
| 收录类别 | SCI |
| 原文出处 | http://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=319&SID=Y1p6iIKgd@dencla9el&page=1&doc=1 |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/97994]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | CAO, DX,CHU, TC,ZHOU, ZY,et al. LATTICE DEFORMATION AND IMPURITY LOCATION OF BI IMPLANTED SI INDUCED BY PULSED LASER ANNEALING[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH,1981,191(1-3):54-58. |
| APA | CAO, DX,CHU, TC,ZHOU, ZY,DAI, RZ,HU, JZ,&DEUTCH, BI.(1981).LATTICE DEFORMATION AND IMPURITY LOCATION OF BI IMPLANTED SI INDUCED BY PULSED LASER ANNEALING.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH,191(1-3),54-58. |
| MLA | CAO, DX,et al."LATTICE DEFORMATION AND IMPURITY LOCATION OF BI IMPLANTED SI INDUCED BY PULSED LASER ANNEALING".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH 191.1-3(1981):54-58. |
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