LASER RECRYSTALLIZATION AND HYDROGEN PLASMA ANNEALING OF ION-IMPLANTED POLYSILICON
文献类型：期刊论文
| 作者 | FANG, F ; LIN, CL ; SHEN, ZY ; TSOU, SC |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1985 |
| 卷号 | 7-8期号:MAR页码:348-351 |
| ISSN号 | 0168-583X |
| 通讯作者 | FANG, F, CHINESE ACAD SCI,SHANGHAI INST MET,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 原文出处 | http://www.sciencedirect.com/science/article/pii/0168583X85905798 |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98073]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | FANG, F,LIN, CL,SHEN, ZY,et al. LASER RECRYSTALLIZATION AND HYDROGEN PLASMA ANNEALING OF ION-IMPLANTED POLYSILICON[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1985,7-8(MAR):348-351. |
| APA | FANG, F,LIN, CL,SHEN, ZY,&TSOU, SC.(1985).LASER RECRYSTALLIZATION AND HYDROGEN PLASMA ANNEALING OF ION-IMPLANTED POLYSILICON.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,7-8(MAR),348-351. |
| MLA | FANG, F,et al."LASER RECRYSTALLIZATION AND HYDROGEN PLASMA ANNEALING OF ION-IMPLANTED POLYSILICON".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 7-8.MAR(1985):348-351. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。