TI SILICIDE FORMATION USING AS ION-BEAM MIXING
文献类型：期刊论文
| 作者 | YU, N ; ZHOU, ZY ; ZHOU, W ; TSOU, SC ; ZHU, DZ |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1987 |
| 卷号 | 2-19页码:746-748 |
| ISSN号 | 0168-583X |
| 通讯作者 | YU, N, ACAD SINICA,SHANGHAI INST MET,ION BEAM LAB,865 CHANG NING RD,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 原文出处 | http://www.sciencedirect.com/science/article/pii/S0168583X87801490 |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98101]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | YU, N,ZHOU, ZY,ZHOU, W,et al. TI SILICIDE FORMATION USING AS ION-BEAM MIXING[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1987,2-19:746-748. |
| APA | YU, N,ZHOU, ZY,ZHOU, W,TSOU, SC,&ZHU, DZ.(1987).TI SILICIDE FORMATION USING AS ION-BEAM MIXING.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2-19,746-748. |
| MLA | YU, N,et al."TI SILICIDE FORMATION USING AS ION-BEAM MIXING".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 2-19(1987):746-748. |
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