DOPANT REDISTRIBUTION OF AS-IMPLANTED SOI FILMS DURING RAPID THERMAL ANNEALING
文献类型：期刊论文
| 作者 | LIN, CL ; TSOU, SC |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1987 |
| 卷号 | 21期号:2-4页码:627-628 |
| ISSN号 | 0168-583X |
| 通讯作者 | LIN, CL, ACAD SINICA,SHANGHAI INST MET,ION BEAM LAB,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 原文出处 | http://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=127&SID=Y1p6iIKgd@dencla9el&page=1&doc=1 |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98103]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | LIN, CL,TSOU, SC. DOPANT REDISTRIBUTION OF AS-IMPLANTED SOI FILMS DURING RAPID THERMAL ANNEALING[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1987,21(2-4):627-628. |
| APA | LIN, CL,&TSOU, SC.(1987).DOPANT REDISTRIBUTION OF AS-IMPLANTED SOI FILMS DURING RAPID THERMAL ANNEALING.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,21(2-4),627-628. |
| MLA | LIN, CL,et al."DOPANT REDISTRIBUTION OF AS-IMPLANTED SOI FILMS DURING RAPID THERMAL ANNEALING".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 21.2-4(1987):627-628. |
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