TEM STUDY OF THE MOLECULAR EFFECT IN PHOSPHORUS IMPLANTED SILICON
文献类型：期刊论文
| 作者 | SHI, TS ; DEVEIRMAN, A ; VANLANDUYT, J ; YANG, GQ ; LIN, CL |
| 刊名 | PHYSICA STATUS SOLIDI A-APPLIED RESEARCH
 |
| 出版日期 | 1990 |
| 卷号 | 120期号:2页码:K131-& |
| ISSN号 | 0031-8965 |
| 通讯作者 | SHI, TS, ACAD SINICA,SHANGHAI INST MET,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter |
| 收录类别 | SCI |
| 原文出处 | http://onlinelibrary.wiley.com/doi/10.1002/pssa.2211200247/abstract?systemMessage=Wiley+Online+Library+will+be+disrupted+4+Feb+from+10-12+GMT+for+monthly+maintenance |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98247]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | SHI, TS,DEVEIRMAN, A,VANLANDUYT, J,et al. TEM STUDY OF THE MOLECULAR EFFECT IN PHOSPHORUS IMPLANTED SILICON[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,1990,120(2):K131-&. |
| APA | SHI, TS,DEVEIRMAN, A,VANLANDUYT, J,YANG, GQ,&LIN, CL.(1990).TEM STUDY OF THE MOLECULAR EFFECT IN PHOSPHORUS IMPLANTED SILICON.PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,120(2),K131-&. |
| MLA | SHI, TS,et al."TEM STUDY OF THE MOLECULAR EFFECT IN PHOSPHORUS IMPLANTED SILICON".PHYSICA STATUS SOLIDI A-APPLIED RESEARCH 120.2(1990):K131-&. |
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