PROPERTIES AND STRUCTURE OF SILICON-NITRIDE FILMS SYNTHESIZED BY ION-BEAM-ENHANCED DEPOSITION
文献类型:期刊论文
作者 | LIU, XH ; YU, YH ; ZHENG, ZH ; HUANG, W ; Zou, SC(邹世昌) ; JIN, ZQ ; CHANG, M ; XU, SL ; TANIGUCHI, S ; SHIBATA, T ; NAKAMURA, K |
刊名 | SURFACE & COATINGS TECHNOLOGY |
出版日期 | 1991 |
卷号 | 46期号:2页码:227-232 |
ISSN号 | 0257-8972 |
通讯作者 | LIU, XH, ACAD SINICA,SHANGHAI INST MET,ION BEAM LAB,SHANGHAI 200050,PEOPLES R CHINA |
学科主题 | Materials Science, Coatings & Films; Physics, Applied |
收录类别 | SCI |
原文出处 | http://www.sciencedirect.com/science/article/pii/025789729190165S |
语种 | 英语 |
公开日期 | 2012-03-25 |
源URL | [http://ir.sim.ac.cn/handle/331004/98294] |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文(1999年以前) |
推荐引用方式 GB/T 7714 | LIU, XH,YU, YH,ZHENG, ZH,et al. PROPERTIES AND STRUCTURE OF SILICON-NITRIDE FILMS SYNTHESIZED BY ION-BEAM-ENHANCED DEPOSITION[J]. SURFACE & COATINGS TECHNOLOGY,1991,46(2):227-232. |
APA | LIU, XH.,YU, YH.,ZHENG, ZH.,HUANG, W.,Zou, SC.,...&NAKAMURA, K.(1991).PROPERTIES AND STRUCTURE OF SILICON-NITRIDE FILMS SYNTHESIZED BY ION-BEAM-ENHANCED DEPOSITION.SURFACE & COATINGS TECHNOLOGY,46(2),227-232. |
MLA | LIU, XH,et al."PROPERTIES AND STRUCTURE OF SILICON-NITRIDE FILMS SYNTHESIZED BY ION-BEAM-ENHANCED DEPOSITION".SURFACE & COATINGS TECHNOLOGY 46.2(1991):227-232. |
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