EFFECTS OF ION-IMPLANTATION ON SURFACE-COMPOSITION AND ENHANCED ETCHING IN LINBO3
文献类型：期刊论文
| 作者 | SHAO, TH ; JIANG, XY ; SHANG, W ; FENG, XQ |
| 刊名 | MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
 |
| 出版日期 | 1991 |
| 卷号 | 10期号:1页码:19-24 |
| ISSN号 | 0921-5107 |
| 关键词 | WAVE-GUIDES DIFFUSION |
| 通讯作者 | SHAO, TH, ACAD SINICA,SHANGHAI INST MET,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Materials Science, Multidisciplinary; Physics, Condensed Matter |
| 收录类别 | SCI |
| 原文出处 | http://www.sciencedirect.com/science/article/pii/092151079190089E |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98329]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | SHAO, TH,JIANG, XY,SHANG, W,et al. EFFECTS OF ION-IMPLANTATION ON SURFACE-COMPOSITION AND ENHANCED ETCHING IN LINBO3[J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,1991,10(1):19-24. |
| APA | SHAO, TH,JIANG, XY,SHANG, W,&FENG, XQ.(1991).EFFECTS OF ION-IMPLANTATION ON SURFACE-COMPOSITION AND ENHANCED ETCHING IN LINBO3.MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,10(1),19-24. |
| MLA | SHAO, TH,et al."EFFECTS OF ION-IMPLANTATION ON SURFACE-COMPOSITION AND ENHANCED ETCHING IN LINBO3".MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY 10.1(1991):19-24. |
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