FORMATION AND CHARACTERIZATION OF SHALLOW JUNCTIONS BY THROUGH-FILM ION-IMPLANTATION IN GAAS
文献类型：期刊论文
| 作者 | SHEN, HL ; XU, HL ; XIA, GQ ; Zou, SC(邹世昌） ; ZHOU, ZY ; JIANG, BY ; LIU, XH |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1993 |
| 卷号 | Jan-80页码:687-690 |
| ISSN号 | 0168-583X |
| 通讯作者 | SHEN, HL, ACAD SINICA,SHANGHAI INST MET,STATE KEY LAB FUNCT MAT INFORMAT,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 原文出处 | http://www.sciencedirect.com/science/article/pii/0168583X93962104 |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98432]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | SHEN, HL,XU, HL,XIA, GQ,et al. FORMATION AND CHARACTERIZATION OF SHALLOW JUNCTIONS BY THROUGH-FILM ION-IMPLANTATION IN GAAS[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1993,Jan-80:687-690. |
| APA | SHEN, HL.,XU, HL.,XIA, GQ.,Zou, SC.,ZHOU, ZY.,...&LIU, XH.(1993).FORMATION AND CHARACTERIZATION OF SHALLOW JUNCTIONS BY THROUGH-FILM ION-IMPLANTATION IN GAAS.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,Jan-80,687-690. |
| MLA | SHEN, HL,et al."FORMATION AND CHARACTERIZATION OF SHALLOW JUNCTIONS BY THROUGH-FILM ION-IMPLANTATION IN GAAS".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS Jan-80(1993):687-690. |
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