MEV IMPLANTATION INTO SEMICONDUCTORS
文献类型：期刊论文
| 作者 | WILLIAMS, JS ; ELLIMAN, RG ; RIDGWAY, MC ; JAGADISH, C ; ELLINGBOE, SL ; GOLDBERG, R ; PETRAVIC, M ; WONG, WC ; DEZHANG, Z ; NYGREN, E ; SVENSSON, BG |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1993 |
| 卷号 | Jan-80页码:507-513 |
| 关键词 | EPITAXIAL CRYSTALLIZATION ION-IMPLANTATION AMORPHOUS SI SILICON AMORPHIZATION SUPERLATTICES |
| ISSN号 | 0168-583X |
| 通讯作者 | WILLIAMS, JS, AUSTRALIAN NATL UNIV,RES SCH PHYS SCI & ENGN,DEPT ELECTR MAT ENGN,CANBERRA,ACT 2600,AUSTRALIA |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 原文出处 | http://www.sciencedirect.com/science/article/pii/0168583X9396170H |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98434]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | WILLIAMS, JS,ELLIMAN, RG,RIDGWAY, MC,et al. MEV IMPLANTATION INTO SEMICONDUCTORS[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1993,Jan-80:507-513. |
| APA | WILLIAMS, JS.,ELLIMAN, RG.,RIDGWAY, MC.,JAGADISH, C.,ELLINGBOE, SL.,...&SVENSSON, BG.(1993).MEV IMPLANTATION INTO SEMICONDUCTORS.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,Jan-80,507-513. |
| MLA | WILLIAMS, JS,et al."MEV IMPLANTATION INTO SEMICONDUCTORS".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS Jan-80(1993):507-513. |
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