INVESTIGATION OF BURIED ALN LAYERS FORMED BY NITROGEN IMPLANTATION INTO AL
文献类型：期刊论文
| 作者 | LIN, C ; LI, Y ; KILNER, JA ; CHATER, RJ ; LI, J ; NEJIM, A ; ZHANG, JP ; HEMMENT, PLF |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1993 |
| 卷号 | Jan-80页码:323-326 |
| ISSN号 | 0168-583X |
| 通讯作者 | LIN, C, SHANGHAI INST MET,ION BEAM LAB,SHANGHAI,PEOPLES R CHINA |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 原文出处 | http://www.sciencedirect.com/science/article/pii/0168583X9396133W |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98443]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | LIN, C,LI, Y,KILNER, JA,et al. INVESTIGATION OF BURIED ALN LAYERS FORMED BY NITROGEN IMPLANTATION INTO AL[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1993,Jan-80:323-326. |
| APA | LIN, C.,LI, Y.,KILNER, JA.,CHATER, RJ.,LI, J.,...&HEMMENT, PLF.(1993).INVESTIGATION OF BURIED ALN LAYERS FORMED BY NITROGEN IMPLANTATION INTO AL.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,Jan-80,323-326. |
| MLA | LIN, C,et al."INVESTIGATION OF BURIED ALN LAYERS FORMED BY NITROGEN IMPLANTATION INTO AL".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS Jan-80(1993):323-326. |
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