ELECTRICAL CHARACTERIZATION OF THIN-FILM SIMOX STRUCTURES
文献类型：期刊论文
| 作者 | ZHU, WH ; LIN, CL ; SHI, ZY ; Zou, SC(邹世昌） ; HEMMENT, PLF ; NEJIM, A |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 1993 |
| 卷号 | 74期号:1-2页码:218-221 |
| 关键词 | SILICON LAYERS |
| ISSN号 | 0168-583X |
| 通讯作者 | ZHU, WH, CHINESE ACAD SCI,SHANGHAI INST MET,ION BEAM LAB,SHANGHAI 200050,PEOPLES R CHINA |
| 学科主题 | Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear |
| 收录类别 | SCI |
| 原文出处 | http://www.sciencedirect.com/science/article/pii/0168583X93950479 |
| 语种 | 英语 |
| 公开日期 | 2012-03-25 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/98485]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前) |
| 推荐引用方式 GB/T 7714 | ZHU, WH,LIN, CL,SHI, ZY,et al. ELECTRICAL CHARACTERIZATION OF THIN-FILM SIMOX STRUCTURES[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1993,74(1-2):218-221. |
| APA | ZHU, WH,LIN, CL,SHI, ZY,Zou, SC,HEMMENT, PLF,&NEJIM, A.(1993).ELECTRICAL CHARACTERIZATION OF THIN-FILM SIMOX STRUCTURES.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,74(1-2),218-221. |
| MLA | ZHU, WH,et al."ELECTRICAL CHARACTERIZATION OF THIN-FILM SIMOX STRUCTURES".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 74.1-2(1993):218-221. |
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